By our unique and carefully controlled synthesis process, The porous ceramic substrate or panel has uniform size and uniform distribution of through pores.
It can achieve fully distributed effect when used in the field of filtration or object suction.
․The pore size could be controlled in the range from submicrometer to several tenth micrometers.
․The ventilation rate could be controlled from 30% to 80%
․Have rigid and strong mechanical properties, The breakdown stress can sustain up to 900~1000 kg/cm2.
․The flatness of the panel surface: 5 um/100 mm.
․The surface roughness of the panel: 2 um or better.
Either in the application field of object suction or filtration, any shape and size of the panels are available. a chuck table for wafer dicing, the dimension of the panel diameter could be 12”,8”,6”,5’,4”,3” and other dimensions are available.
Figure 2 is a square type of chuck table used for LED wafer, screen printing or slurry filtration, we can supply the dimension(C) of the panel side by dimensions below 300 mm