Semi-Auto LED UV Irradiation Machine  |產品介紹|English|Equipment Products

Semi-Auto LED UV Irradiation Machine

Model: Semi-Auto LED UV Irradiation Machine

The UVD-612 series program control UV curing system provides precision controlled and repeatable UV tape curing for single-frame processing of wafer, and the UVD-612 touch panel can display all process parameters on-line, with the 300 mm diameter UV irradiation window, UV-800 can handle all standard wafer size up to 8” (200 mm).


Easy to setup and use.

Friendly HMI touch panel: UV-800 HMI was designed for conveniently to operate, easy to maintain and high stability, It provide the function of remote control.

1. On-line monitoring: 1. status of UV lamps

2. Life time of UV lamps

3. total illumination display

Air pressure MAX. 0.3~0.5 Mpa (3~5㎏/cm2)
Air consumption MAX. 100NL/MIN.
Power Supply 220 VAC 60 HZ
Power Consumption 1 KVA
Instantaneous power 3KVA
spec(W ×D ×H) W730 ×D680 ×H1000 ㎜
Nitrogen pressure MAX. 0.3~0.5 Mpa (3~5㎏/cm2)
Nitrogen consumption MAX. 20NL/MIN.
Weight 約150㎏


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Semi-Auto LED UV Irradiation Machine