Semi-Auto LED UV Irradiation Machine

Model：	Semi-Auto LED UV Irradiation Machine
Desc：	The UVD-612 series program control UV curing system provides precision controlled and repeatable UV tape curing for single-frame processing of wafer, and the UVD-612 touch panel can display all process parameters on-line, with the 300 mm diameter UV irradiation window, UV-800 can handle all standard wafer size up to 8” (200 mm).
Char：	Easy to setup and use. Friendly HMI touch panel: UV-800 HMI was designed for conveniently to operate, easy to maintain and high stability, It provide the function of remote control. 1. On-line monitoring: 1. status of UV lamps 2. Life time of UV lamps 3. total illumination display

Model：

Desc：

The UVD-612 series program control UV curing system provides precision controlled and repeatable UV tape curing for single-frame processing of wafer, and the UVD-612 touch panel can display all process parameters on-line, with the 300 mm diameter UV irradiation window, UV-800 can handle all standard wafer size up to 8” (200 mm).

Char：

Easy to setup and use.

Friendly HMI touch panel: UV-800 HMI was designed for conveniently to operate, easy to maintain and high stability, It provide the function of remote control.

1. On-line monitoring: 1. status of UV lamps

2. Life time of UV lamps

3. total illumination display

Air pressure	MAX. 0.3～0.5 Mpa （3~5㎏/cm2）
Air consumption	MAX. 100NL/MIN.
Power Supply	220 VAC 60 HZ
Power Consumption	1 KVA
Instantaneous power	3KVA
consumption
spec（W ×D ×H）	W730 ×D680 ×H1000 ㎜
Nitrogen pressure	MAX. 0.3～0.5 Mpa （3~5㎏/cm2）
Nitrogen consumption	MAX. 20NL/MIN.
Weight	約150㎏

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Semi-Auto LED UV Irradiation Machine

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Semi-Auto LED UV Irradiation Machine